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一种新的ESD扰度衡量方法 Introduction Electrostaticdischarge(ESD)hasbeenasignificantproblemintheelectronicsindustry,asitcancauseconsiderabledamagetoelectronicdevices.ESDisasuddencurrentflowbetweentwoelectricallychargedobjectscausedbyacontactoranear-contactbetweenthem.Thesedischargescancauseirreparabledamagetosensitiveelectroniccomponents,resultinginmanufacturingdefects,reducedproductreliability,orcompletedevicefailure.Therefore,itisessentialtomonitorandcontroltheESDenvironmentinelectronicsmanufacturingtoreducetheimpactofESDondeviceperformanceandreliability. OneofthechallengesinESDcontrolisidentifyingandquantifyingESDevents.TraditionalESDmeasurements,suchasHumanBodyModel(HBM)orChargedDeviceModel(CDM),provideonlyalimitedviewoftheESDenvironmentanddonotaccountforthepropagationofESDthroughthemanufacturingprocess.Thus,anewESDdisturbancemeasurementmethodisneededtodetectandquantifytheESDenvironmentaccurately. ThispaperpresentsanewESDdisturbancemeasurementmethodthatcaneffectivelymeasurethepropagationofESDthroughthemanufacturingprocess. Background ThetraditionalESDmeasurementtechniquesarelimitedintheirabilitytomeasurethepropagationofESD.HBMmeasurestheESDdischargeonahumanbody,whileCDMmeasuresthedischargeonachargeddevice.WhilethesemethodscandetectESDevents,theycannotdeterminetheseverityandpropagationofESDthroughthemanufacturingprocess,whichiscriticalforcontrollingESDinelectronicsmanufacturing. Toovercometheselimitations,variousESDdisturbancemeasurementmethodshavebeendeveloped,suchastheTransmissionLinePulse(TLP)andtheMachineModel(MM).ThesemethodsprovideamoredetailedviewoftheESDenvironment,buttheystilldonotaccountforthepropagationofESDthroughthemanufacturingprocess. ProposedMethod TheproposedmethodaimstomeasurethepropagationofESDthroughthemanufacturingprocessbydetectingtheelectromagneticfieldsgeneratedbyESDevents.ThemethodinvolvesplacinganESDsensorineachstationofthemanufacturingprocesstomeasuretheelectricandmagneticfieldsoftheESDevents.Thesensorisconnectedtoacomputer,whichrecordstheamplitud