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基于电气石衬底的沉积温度对ZnO薄膜结晶和光学特性的影响（英文）.docx

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基于电气石衬底的沉积温度对ZnO薄膜结晶和光学特性的影响（英文） Inrecentyears,ZincOxide(ZnO)hasgainedconsiderableattentionbecauseofitsuniqueelectronicandopticalproperties.Amongvariousdepositiontechniquesavailabletofabricatethinfilms,thechemicaldepositionmethod,whichincludeschemicalbathdeposition,isanattractivemethodduetoitslowcost,simplicityoftheprocessandeasy-to-controldepositionconditions.Also,theuseofasuitablesubstrateisimportanttoobtainhigh-qualityZnOthinfilmswithdesiredproperties. Inthisstudy,theinfluenceofthedepositiontemperatureonthestructuralandopticalpropertiesofZnOthinfilmspreparedviathechemicalbathdepositionmethodusinganelectricallyconductivesubstratewasanalyzed.TheelectricallyconductivesubstrateinthisstudyisElectricalstone. Initially,thesubstratewascleanedbywashingitwithacombinationofH2SO4andHNO3,followedbyrinsingwithdistilledwateranddryinginanoven.AprecursorsolutionconsistingofZincacetate,ammoniumhydroxideanddeionizedwaterwasthenpreparedandkeptatroomtemperature.Thetemperatureoftheprecursorsolutionwascontrolledinarangefrom60°Cto80°Cwhiledepositionswerecarriedout. X-raydiffractionanalysisrevealedthatallfilmswerepreferentiallyorientedalongthe(002)directionofthecrystalplanewithnootherimpuritypeaksobserved.Thecrystallinequalityofthefilmsimprovedasthedepositiontemperatureincreasedfrom60°Cto80°C.Thegrainsizeofthefilmswasfoundtoincreasefrom25nmto34nmwithincreasingdepositiontemperature.Thissignifiesthattheparticlediameterincreaseswithdepositiontemperatureresultinginanincreaseinthegrainsize. ScanningElectronMicroscopy(SEM)wasusedtoinvestigatethesurfacemorphologyofthefilms.Asthedepositiontemperatureincreased,thesizeoftheparticlesincreasedandthefilmsdisplayedamoreuniformdistribution.Itindicatesthattheincreaseindepositiontemperatureresultsintheformationofadenserandmoreuniformfilmstructurewithafiner-grainsize. Theopticalpropertiesofthethinfilmswerecharacterizedintermsoftransmittanceandabsorptionspectra.Allthefilmsshowedahightransmittanceinthevisibleregion,indicatingtheirstrongpotentialforoptoelect