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基于计算机显微视觉的微动平台位移测量方法 Title:DisplacementMeasurementMethodforMicro-motionPlatformbasedonComputerVision Abstract: Micro-motionplatformsarewidelyusedinvariousfields,suchasprecisionmanufacturing,robotics,andbiologicalresearch.Accuratedisplacementmeasurementiscrucialforensuringtheperformanceandreliabilityoftheseplatforms.Inrecentyears,thedevelopmentofcomputervisiontechniqueshasprovidednewpossibilitiesfornon-contactdisplacementmeasurement.Thispaperpresentsacomprehensivereviewofdifferentapproachesandalgorithmsfordisplacementmeasurementofmicro-motionplatformsbasedoncomputervision. 1.Introduction Micro-motionplatformsareessentialcomponentsinhigh-precisionsystemsthatrequiresub-micronpositioningaccuracy.Traditionaldisplacementmeasurementmethods,suchascontactprobesorlaserinterferometers,posechallengesintermsofaccuracy,repeatability,andintegrationwithreal-timefeedbackcontrolsystems.Computervision-baseddisplacementmeasurementmethodsoffernon-contact,high-resolution,andreal-timesolutionsthatovercometheselimitations. 2.ComputerVisionTechniquesforDisplacementMeasurement 2.1Imageacquisition Theimageacquisitionprocessinvolvescapturingimagesofthemicro-motionplatform.Varioustechniques,suchasframegrabbers,high-speedcameras,andsynchronizedlighting,canbeusedtoimprovetheimagequalityandminimizemotionblur. 2.2Imageprocessing Imageprocessingtechniquesplayavitalroleinextractingfeaturesandpatternsfromtheacquiredimages.Pre-processingtechniqueslikenoisereduction,imageenhancement,andimagesegmentationhelpimprovetheaccuracyandreliabilityofsubsequentanalysis. 2.3Featureextraction Featureextractionmethodsfocusonidentifyingkeypointsorlandmarksonthemicro-motionplatform.Techniquessuchastemplatematching,cornerdetection,andedgedetectioncanbeemployedtolocateandtracktheplatform'spositionaccurately. 2.4Motionestimationandtracking Motionestimationalgorithmsestimatethedisplacementofthemicro-motionplatformbycomparingconsecutiveimages.Opticalflow,blockmatching,orpatterntrackingmethodscanbeemployedtotracktheplatform'