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FAMS中的颗粒切削的微观机理的研究 Title:MicroscopicMechanismsofParticleMachininginFocusedionbeam-assistedMaterialSystems(FAMS) Abstract: Focusedionbeam-assistedmaterialsystems(FAMS)havegainedsignificantattentioninrecentyearsfortheirabilitytoperformhigh-precisionmachiningatthemicroandnanoscale.ThispaperaimstoinvestigatethemicroscopicmechanismsunderlyingparticlemachininginFAMS.Byexaminingtheinteractionsbetweentheionbeam,targetmaterial,andresultingparticles,wecangaininsightsintothefundamentalprinciplesgoverningthecuttingprocess.TheresultsofthisresearchprovideafoundationforoptimizingparticlemachiningtechniquesandimprovingtheoverallmachiningefficiencyinFAMS. 1.Introduction: 1.1Background: Focusedionbeam(FIB)technologyhasemergedasapowerfultoolforprecisionmilling,deposition,andimagingatthesub-micrometerscale.FIB-assistedmaterialsystems(FAMS)haveextendedthecapabilitiesoftraditionalFIBsystemsbyincorporatingavarietyofparticlesources,suchasnanoparticles,microparticles,andnanoclusters,forenhancedmachiningperformance. 1.2Objectives: TheobjectiveofthisstudyistoinvestigatethemicroscalemechanismsinvolvedinparticlemachininginFAMS.Byunderstandingthesemechanisms,wecanoptimizemachiningparameters,enhancemachiningefficiency,andimprovetheoverallperformanceofFAMS. 2.MicroscopicInteractionsinParticleMachining: 2.1Ion-ParticleInteraction: Theinteractionbetweentheincidentionbeamandtheparticlesplaysacrucialroleinparticlemachining.Theionstransferenergytotheparticles,causingdeformation,fragmentation,andsubsequentremovalfromthematerialsurface. 2.2MaterialRemovalMechanisms: Theremovalofparticlesfromthesurfacecanoccurthroughmultiplemechanisms,includingsputtering,evaporation,anddelamination.Thespecificmechanismdependsonvariousfactorssuchasionenergy,particlesize,andmaterialproperties. 2.3DeformationandDamage: Duringparticlemachining,thetargetmaterialundergoesdeformationanddamageduetotheimpactofenergeticparticles.Thisdeformationcaninducemicrostructuralchangesandaffectthematerial'smechanicalproperties. 3.Experimental