预览加载中，请您耐心等待几秒...

介电式AlCuO复合薄膜换能元研究.docx

预览
1/2
2/2

在线预览结束，喜欢就下载吧，查找使用更方便

下载提示 文本预览

如果您无法下载资料，请参考说明：

1、部分资料下载需要金币，请确保您的账户上有足够的金币

2、已购买过的文档，再次下载不重复扣费

3、资料包下载后请先用软件解压，在使用对应软件打开

介电式AlCuO复合薄膜换能元研究 Abstract: DielectricAlCuOcompositethinfilmisapromisingmaterialforenergyconversionapplicationsduetoitsexcellentdielectric,piezoelectric,andsemiconductingproperties.Inthispaper,wepresentacomprehensivereviewoftheresearchontheAlCuOcompositethinfilmasatransducerelement.Thefocusisonthefabricationmethods,properties,andpotentialapplicationsoftheAlCuOthinfilminenergyharvestingandsensingdevices. 1.Introduction Thedemandforenergyharvestingandsensingdeviceshasbeengrowingrapidlyinrecentyears.Thesedevicesconvertmechanicalenergy,suchasvibrationsorpressure,intoelectricalenergyandcanbeusedtopowerlow-powerelectronicdevicesorassensorsinvariousapplications.TheAlCuOcompositethinfilmhasshownpromisingpotentialasatransducerelementduetoitsuniquecombinationofdielectric,piezoelectric,andsemiconductingproperties. 2.FabricationMethods ThereareseveralmethodsavailableforthefabricationofAlCuOcompositethinfilms,includingphysicalvapordeposition(PVD),chemicalvapordeposition(CVD),andspincoating.Eachmethodhasitsadvantagesanddisadvantagesintermsoffilmquality,depositionrate,andcost.Thechoiceoffabricationmethoddependsonthespecificrequirementsoftheapplication. 3.PropertiesofAlCuOCompositeThinFilm TheAlCuOcompositethinfilmpossessesexcellentdielectricproperties,whichmakeitsuitableforenergystorageapplications.Ithasahighdielectricconstant,lowdielectricloss,andgoodinsulationproperties.Inaddition,itexhibitspiezoelectricbehavior,whichallowsfortheconversionofmechanicalenergyintoelectricalenergy.TheAlCuOthinfilmalsohassemiconductingproperties,whichmakeitusefulforsensingapplications. 4.PotentialApplications TheAlCuOcompositethinfilmhaspotentialapplicationsinvariousenergyharvestingandsensingdevices.Forenergyharvesting,itcanbeusedinvibrationenergyharvestersorpressuresensorstoconvertmechanicalenergyintoelectricalenergy.Itssemiconductingpropertiesmakeitasuitablematerialforgassensorsorhumiditysensors.TheAlCuOthinfilmcanalsobeusedasatransducerelementinacousticdevices,suchasspeakersormicrophones. 5.Challe