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一种基于光学集成芯片的紧凑型结构光产生系统(英文) Introduction Structuredlight,atechniquewidelyusedin3Dimagingandmetrology,hasalwaysbeenanimportanttopicinthefieldofopticalinformationprocessing.Ittypicallyconsistsofpatternsoflightanddarkregions,suchasasinusoidalorstripepattern.Thesepatternscanbeusedtoinfertheshape,distance,andorientationofobjectsinthescene.However,conventionalstructuredlightsystemsusuallyrequirelargeandcomplexopticalsetupstoproducehigh-qualitypatterns,whichlimitstheirapplicationinvariousscenarios. Toovercomethislimitation,weproposeacompactstructuredlightgenerationsystembasedonanintegratedopticalchip.Thissystemuseswaveguidesandphasemodulatorstoproducehigh-qualitystructuredlightpatternswithhighefficiencyandcompactsize.Inthispaper,wewilldiscussthedesign,fabrication,andexperimentalresultsoftheproposedsystem. DesignandFabrication Theproposedsystemconsistsoftwokeycomponents:awaveguidearrayandaphasemodulatorarray.Thewaveguidearrayisusedtotransportlightefficientlyandpreciselytoeachphasemodulator,whilethephasemodulatorsareusedtoimpartaphaseshifttothelightandgeneratestructuredlightpatterns. Thewaveguidearrayisdesignedasatwo-dimensionalgridofstraightwaveguideswithaspacingofafewmicrometersbetweenthem.Thewaveguidesaremadeofsilicondioxide,whichhashightransparencyinthevisibleandnear-infraredrange.Thewaveguidearrayisthenpatternedontoasiliconsubstrateusingstandardphotolithographyandreactiveionetchingtechniques. Thephasemodulatorarrayisdesignedasanarrayofphaseshifters,eachconsistingofaMach-Zehnderinterferometer(MZI)withtwothermo-opticphaseshifters.TheMZIisacommontypeofinterferometerthatsplitstheinputlightintotwoarms,whichthenrecombineandinterferewitheachother.Bychangingthetemperatureofthephaseshifters,therelativephasedifferencebetweenthetwoarmscanbecontrolled,whichinturnchangestheoverallphaseoftheoutputlight. Thephasemodulatorarrayisfabricatedusingacombinationofsiliconphotonicsandmicro-electromechanicalsystem(MEMS)techniques.Thephaseshiftersaremadeofathinlayerofsiliconnitridedepositedontopof