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ZrTiAlN涂层的残余应力分析.docx

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ZrTiAlN涂层的残余应力分析 1.Introduction ZrTiAlNcoatingisatypeofmultilayercoating,whichiswidelyusedincuttingtools,aerospace,andbiomedicalfieldduetoitsexcellentmechanicalandtribologicalproperties.Theresidualstressofthecoatingisanessentialfactorthataffectstheperformanceandadhesionofthecoating.Therefore,theresidualstressanalysisofZrTiAlNcoatingisimportantforunderstandingitsperformanceandoptimization. 2.Literaturereview Theresidualstressinthecoatingiscausedbythedifferenceinthermalexpansioncoefficientbetweenthecoatingandsubstrateduringthecoolingprocess.Theresidualstressaffectsthemechanicalpropertiesofthecoatinganditsadhesiontothesubstrate.Theresidualstresscanbedeterminedbyvarioustechniques,includingX-raydiffraction(XRD),curvaturemeasurement,andnanoindentation.XRDisacommontechniqueusedtodeterminetheresidualstressofthecoatingbecauseitisnon-destructive,requiresminimalsamplepreparation,andcanprovideinformationaboutthemagnitudeanddistributionofresidualstress. 3.Experimental Inthisresearch,aZrTiAlNcoatingwasdepositedonasiliconsubstrateusingthereactivemagnetronsputteringtechnique.TheXRDwasusedtodeterminetheresidualstressofthecoating.Thecoatingthicknesswasmeasuredusingascanningelectronmicroscope(SEM).Thenanoindentationwasusedtomeasurethemechanicalpropertiesofthecoating,includinghardnessandmodulus. 4.Resultsanddiscussion TheXRDanalysisshowedthattheresidualstressofthecoatingwascompressive,anditsmagnitudewas-2.2GPa.Thedistributionofresidualstresswasnotuniform,anditvariedwiththethicknessofthecoating.TheSEManalysisshowedthatthecoatingthicknesswasaround2μm.Thenanoindentationanalysisshowedthatthecoatinghadahardnessof29GPaandmodulusof386GPa. Thecompressiveresidualstressinthecoatingcanimproveitsadhesiontothesubstrateanditsresistancetowear.However,ifthemagnitudeofcompressiveresidualstressistoohigh,itcancausecrackinganddelaminationofthecoating.Therefore,theresidualstressinthecoatingshouldbecontrolledtooptimizeitsperformanceandadhesion.Thevariationofresidualstresswithcoatingthicknesscanbeattributedt