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铝掺杂氧化锌(AZO)废弃靶材回收再利用的研究(英文).docx

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铝掺杂氧化锌(AZO)废弃靶材回收再利用的研究(英文) ResearchonRecyclingandReutilizationofAluminum-dopedZincOxide(AZO)WasteTargets Introduction Aluminum-dopedzincoxide(AZO)hasattractedextensiveattentionforitsoutstandingelectricalandopticalproperties,makingitwidelyusedinvariousfieldssuchastransparentconductivecoatings,photovoltaiccells,andsensors.However,duringtheproductionprocessofAZO,aconsiderableamountofwastetargetsaregenerated,whichnotonlycauseenvironmentalpollutionbutalsowasteresources.Therefore,itisnecessarytoexploreeffectivemethodstorecycleandreutilizeAZOwastetargets. CurrentSituationofAZOWasteTargetRecycling Atpresent,therecyclingofAZOwastetargetsmainlyincludesphysicalandchemicalmethods.Physicalmethodsmainlyincludemechanicalcrushingandseparation,thermaldestruction,magneticseparation,andsoon.Ingeneral,mechanicalcrushingandseparationcanrecoversomeofthevaluablematerials,buttheimpuritycontentisstillhigh,anditcannotmeetthequalityrequirementsofthenewtarget.Thermaldestructioniseffectivefortherecoveryoftargetmaterialsbutmaycausesecondaryenvironmentalpollution.Magneticseparationcanonlyremovesomeimpuritieswithmagneticpropertiesandcannoteffectivelyseparatethetargetmaterial,soitisdifficulttoachievegoodseparationresults.Chemicalmethodsmainlyincludechemicalleaching,solventextraction,andelectrochemicalreduction,etc.However,thesemethodsrequirelargeamountsofchemicals,whichmaycausesecondaryenvironmentalpollution,andtheextractionefficiencyislow. NewMethodsforRecyclingAZOWasteTargets Inrecentyears,newmethodsforrecyclingAZOwastetargetshavebeendeveloped,suchasplasmatreatment,laserablation,andultrasonicextraction,etc.Thesemethodshavetheadvantagesofhighefficiency,lowenvironmentalimpact,andgoodseparationresults. Plasmatreatmentisanon-thermalplasmaprocessthatcaneffectivelydecomposeandvolatilizetheorganicmatteronthewastetargetsurface,andobtainhigh-purityAZOpowder.Theprocessiseasytooperate,andthetreatmenttimeisshort,whichcansaveenergy.Laserablationisatechniquethatusesalasertoablatethesurfaceofthewastetarget,and