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燃烧法合成Al掺杂β-SiC粉体的工艺参数对其介电性能的影响 Introduction: Aluminum-dopedbeta-SiCpowderisanessentialmaterialinelectronicindustriesduetoitsexcellentelectrical,mechanical,andthermalproperties.Inthispaper,wewilldiscusstheimpactoftheprocessparametersonthedielectricpropertiesofAl-dopedbeta-SiCpowdersynthesizedbythecombustionmethod. SynthesisofAl-dopedβ-SiCpowder: CombustionsynthesisisastraightforwardandeconomicalapproachforthesynthesisofAl-dopedbeta-SiCpowder.Theprocessinvolvestherapidcombustionofamixtureoffuelandoxidizertogenerateahightemperature(above2000°C)andhigh-pressure(~100atm)environment,whichfacilitatesthereactionsbetweentheprecursorstoformthedesiredproduct.Thereactionbetweenmagnesium,silicon,andaluminumwasusedtopromotetheformationofAl-dopedbeta-SiCpowder. Effectofprocessparameters: ThefollowingparametershaveanimpactonthedielectricpropertiesoftheAl-dopedβ-SiCpowder: 1.Fuel-to-oxidizerratio:Thefuel-to-oxidizerratiodeterminesthecombustiontemperatureandpressure.Theexcessfuelresultsinalow-temperatureflame,whileexcessoxidizerleadstoahigh-temperatureflame.Ahighercombustiontemperaturecouldleadtohighercrystallinityandpurityofthefinalproduct.However,excessivetemperaturecouldproduceunwantedphasesandcarriersthatmayaffecttheoveralldielectricperformanceofthepowder. 2.Aluminumconcentration:Theconcentrationofaluminumdeterminestheelectricalconductivityofthepowder.Ahigheraluminumconcentrationresultsinlarger-sizedgrainsandhigherelectricalconductivity.Hence,thedielectricconstantandlosstangentofthematerialdecreasewithincreasingaluminumconcentration. 3.Sinteringtemperature:Thesinteringtemperatureisacriticalparameterthatdeterminesthedensityandporosityofthepowder.Highsinteringtemperatureresultsinhigherdensitiesandlowerporosities,whichimprovethemechanicalstrengthandthermalconductivityofthepowder.However,ifthesinteringtemperatureistoohigh,itmaycauseunwantedgraingrowth,whichmayaffectthedielectricproperties. 4.Heatingrate:Theheatingrateaffectstheparticlesizeandmorphologyofthepowder.Ahighheatingratecoul