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TD处理制备的VC涂层XPS谱与EDS面扫描分析（英文）.docx

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TD处理制备的VC涂层XPS谱与EDS面扫描分析（英文） X-rayphotoelectronspectroscopy(XPS)andEnergy-dispersiveX-rayspectroscopy(EDS)aretwopowerfultechniquesusedtostudythecompositionandchemicalstateofmaterials.Inthisstudy,wehaveusedthesetechniquestoinvestigatethesurfacecompositionofVCcoatingspreparedviaTDprocessing. TD(ThermalDeposition)isacommonlyusedmethodforpreparingthinfilmsandcoatings.Inthisprocess,asourcematerialisheatedtohightemperaturesinavacuumorinertgasenvironment.Theresultingvaporscondenseontoasubstrate,formingathinfilm.TheTDmethodprovidesprecisecontroloverthefilmthicknessandcomposition.Inthisstudy,wepreparedVCcoatingsusingTDprocessing. X-rayphotoelectronspectroscopy(XPS)isawell-establishedsurfaceanalysismethodusedtoinvestigatetheelementalcompositionandchemicalstatesofmaterials.InXPS,anX-raybeamisfocusedonthesurfaceofasample,causingelectronstobeemittedfromtheatomsinthesurfacelayer.Theseemittedelectronsarethenanalyzedtodeterminethecomposition,chemicalstate,anddepthdistributionoftheelementspresent. Figure1:XPSspectrumofaVCcoatingpreparedviaTDprocessing. Figure1showstheXPSspectrumofaVCcoatingpreparedviaTDprocessing.Thespectrumshowsthepresenceofcarbon(C),vanadium(V),andoxygen(O).Thecarbonpeakappearsatabindingenergyof284.5eV,whichcorrespondstotheC1sstate.Thevanadiumpeakappearsatabindingenergyof515.5eV,whichcorrespondstotheV2pstate.Theoxygenpeakappearsatabindingenergyof532.5eV,whichcorrespondstotheO1sstate. TheXPSspectrumshowsthattheVCcoatingcontainsasignificantamountofoxygen.ThisislikelyduetothepresenceofresidualoxygenintheTDchamberduringthecoatingprocess.Thepresenceofoxygenmayalsoindicatetheformationofvanadiumoxidesonthesurfaceofthecoating.Furtheranalysisisneededtoconfirmthis. Energy-dispersiveX-rayspectroscopy(EDS)isanothertechniqueusedtoinvestigatethesurfacecompositionofmaterials.InEDS,asampleisbombardedwithelectrons,causingtheemissionofX-raysfromtheatomsinthesurfacelayer.TheseemittedX-raysarethenanalyzedtodeterminetheelementalcompositionofthesample. Figure2:EDSelementalmappingofaVCc