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基于弯振模态的螺纹杆式直线超声电机(英文) Title:LinearUltrasonicMotorBasedonBendingVibrationModeofThreadedRod Abstract: Thispaperpresentsalinearultrasonicmotor(LUSM)basedonthebendingvibrationmodeofathreadedrod,whichovercomessomelimitationsofexistingLUSMs.Theproposeddesignfeaturesathreadedrodmadeofpiezoelectricmaterial,whichoperatesinaresonantbendingmodetoprovidelinearmotionofaslider.Themotorischaracterizedbyhighprecision,lownoise,andhighresponsiveness. Introduction: Ultrasonicmotorshaveattractedincreasingattentioninrecentyearsduetotheiruniqueadvantages,suchashighprecision,fastresponse,andlownoise.Inparticular,linearultrasonicmotors(LUSMs)arewidelyusedinprecisionpositioncontrolapplications.However,mostexistingLUSMssufferfromlimitationssuchaslowforceoutput,lowefficiency,andshortlifespan. Inthispaper,weproposeanewdesignofLUSMbasedonthebendingvibrationmodeofathreadedrod,whichovercomestheselimitations.Theproposedmotorischaracterizedbyhighforceoutput,highefficiency,andlonglifespan.Themotorisalsocompact,lightweight,andeasytomanufacture. DesignoftheLinearUltrasonicMotor: TheproposedLUSMconsistsofathreadedrodmadeofpiezoelectricmaterial,aslider,andapreloadspring.Thethreadedrodisexcitedbyahigh-frequencyvoltagesignaltogeneratebendingvibrationsthatdrivetheslidertomovelinearly.Thepreloadspringensuresconstantcontactbetweenthethreadedrodandtheslider. Theworkingprincipleofthemotorisbasedontheinversepiezoelectriceffect,whichproducesmechanicaldeformationinresponsetoanappliedelectricfield.Thebendingvibrationmodeischosenbecauseitprovideshigherforceoutputandefficiencycomparedtoothervibrationmodes. Thethreadedrodisdesignedwithathreadedsectionandanon-threadedsection.Thethreadedsectionhasalargercross-sectionareaandisincontactwiththeslider.Thenon-threadedsectionhasasmallercross-sectionareaandisusedforexcitation. ExperimentalResults: AnexperimentalprototypeoftheproposedLUSMwasbuiltandtested.Themotorhadatotallengthof25mmandadiameterof6mm.Thethreadedrodhadathreadedsectionof10mmandanon-threadedsectionof15mm. Themot