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不同碱液单晶硅表面织构的初步研究(英文).docx

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不同碱液单晶硅表面织构的初步研究(英文) PreliminaryStudyonSurfaceTextureofSingleCrystallineSiliconwithDifferentAlkalineSolutions Introduction: Singlecrystallinesiliconisawidelyusedmaterialintheelectronicsindustryduetoitsexcellentelectricalproperties.Thepropertiesofsinglecrystallinesiliconarelargelydictatedbyitscrystalstructureandsurfacetexture.Thesurfacetextureofsinglecrystallinesiliconcaninfluenceitsperformanceinelectronicdevicesandsolarcells.Therefore,controllingthesurfacetextureiscrucialinoptimizingthesedevices.Thisstudyaimstoinvestigatethesurfacetextureofsinglecrystallinesiliconwithdifferentalkalinesolutions. MaterialsandMethods: Singlecrystallinesiliconsampleswereobtainedandcleanedwithethanolanddeionizedwater.Thesampleswerethentreatedwithdifferentalkalinesolutions,namelyNaOH,KOH,andLiOH.Theconcentrationsofthealkalinesolutionswere1Mandthetreatmenttimewas10minutes.Aftertreatment,thesampleswerewashedwithdeionizedwateranddriedwithanitrogenflow.Thesurfacetextureofthesampleswasanalyzedusingscanningelectronmicroscopy(SEM)andX-raydiffraction(XRD)analysis. Results: SEManalysisshowedthatthesurfacetextureofsinglecrystallinesiliconwassignificantlyaffectedbythealkalinesolutionusedfortreatment.TheNaOH-treatedsampleshowedaroughsurfacewithagroove-likestructure,whiletheKOH-treatedsampleshowedasmoothersurfacewithapyramidalstructure.TheLiOH-treatedsampleshowedasmoothsurfacewithacircularstructure.XRDanalysisshowedthatthecrystalorientationofthesampleswasnotaffectedbythealkalinetreatment. Discussion: Thesurfacetextureofsinglecrystallinesiliconcanbealteredwithdifferentalkalinetreatments.Thedifferentsurfacetexturesobservedinthisstudycanbeattributedtothedifferentreactivityofthealkalinesolutionswithsinglecrystallinesilicon.NaOHisknowntoreactstronglywithsilicon,andtheroughsurfacewithgroovessuggestsahighetchingrate.KOH,ontheotherhand,reactswithsilicontoformapassivationlayerthatinhibitsfurtheretching.Thisresultsinasmoothersurfacetexture.LiOHhasaweakerreactivitytowardssiliconcomparedtoNaOHandKOH,whichresultsi