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FeNb多层膜中离子辐照效应研究(英文) EffectofIonIrradiationonFeNbMultilayerFilms Introduction FeNbmultilayerfilmsexhibituniquemagneticandstructuralproperties,makingthemattractiveforvariousapplicationssuchasmagneticstorageandspintronics.However,theirperformancecanbeinfluencedbyexternalfactorslikeionirradiation.Ionirradiationisacommontechniquetomodifythephysicalpropertiesofthinfilms,butitseffectonFeNbmultilayerfilmsisnotwellunderstood.ThisstudyinvestigatestheimpactofionirradiationonthestructuralandmagneticpropertiesofFeNbmultilayerfilms. Methodology FeNbmultilayerfilmswerepreparedusingDCmagnetronsputteringontoaSisubstrate.Thefilmswerecomposedof5nmthickFeandNblayers,withavaryingnumberofbilayers(n)rangingfrom10to30.Thefilmswereirradiatedwith1MeVAuionsatafluenceof1×10^16ions/cm^2.X-raydiffraction(XRD)andtransmissionelectronmicroscopy(TEM)wereusedtostudythestructuralchangesinthefilms.Themagneticpropertieswereinvestigatedusingasuperconductingquantuminterferencedevice(SQUID)magnetometer. ResultsandDiscussion XRDanalysisshowedthattheirradiatedfilmshadasmallerpeakwidthandalargerpeakintensitycomparedtothenon-irradiatedfilms.Thisindicatesthationirradiationinducedareductioninthecrystallitesizeandanincreaseinthecrystallineorderofthefilms.TEMimagesconfirmedthereductioninthecrystallitesizeandtheformationofdefectssuchasdislocationsandstackingfaultsintheirradiatedfilms.Thesestructuralchangescanbeattributedtothedisplacementofatomsbytheionirradiation,whichleadstolocallatticedeformationsanddisorder. Themagneticpropertiesofthefilmswereaffecteddifferentlybyionirradiationdependingonthenumberofbilayers.Forfilmswithn=10,ionirradiationinducedanincreaseinthecoercivityandadecreaseinthesaturationmagnetization,indicatingareductioninthemagneticperformanceofthefilm.Forfilmswithn=20and30,ionirradiationhadnosignificanteffectonthemagneticproperties,suggestingthattheirthickerstructuresweremoreresistanttotheionirradiation. Conclusion Insummary,thisstudydemonstratesthationirradiationcanmodifythestructuralandmagneticprop