SnO_2复合薄膜甲烷气敏传感器研究进展.docx

SnO_2复合薄膜甲烷气敏传感器研究进展
摘要：
甲烷是一种常见的可燃气体，其存在在工业和民用领域中广泛应用。研究表明，SnO2复合薄膜甲烷气敏传感器的性能优于纯SnO2传感器。本文综述了SnO2复合薄膜甲烷气敏传感器的研究进展，包括制备方法、传感器结构和性能等方面。研究表明，采用不同的复合材料和制备方法可以得到不同的传感性能。未来的研究方向包括提高传感器灵敏度和选择性，提高传感器的稳定性和寿命等。
关键词：SnO2，复合薄膜，甲烷，气敏传感器
Abstract：
Methaneisacommoncombustiblegasthatiswidelyusedinindustrialandcivilfields.ResearchhasshownthatSnO2compositefilmmethanegassensorsperformbetterthanpureSnO2sensors.ThispaperreviewstheresearchprogressofSnO2compositefilmmethanegassensors,includingpreparationmethods,sensorstructures,andperformances.Studieshaveshownthatdifferentsensingperformancescanbeobtainedbyusingdifferentcompositematerialsandpreparationmethods.Futureresearchdirectionsincludeimprovingsensorsensitivityandselectivity,improvingsensorstabilityandservicelife,etc.
Keywords:SnO2,compositefilm,methane,gassensor
1.Introduction
Methanegasisacommoncombustiblegasandaprimarycomponentofnaturalgas.Itiswidelyusedinindustrialandcivilfields,suchasnaturalgasfuelvehicles,gasstoves,andgasheaters.However,methanegasishighlyexplosiveandtoxic,anditcanposeasignificantthreattohumansafetyifitsconcentrationexceedsacertainlevel.Therefore,itisessentialtodetectandmonitormethanegasconcentrationinreal-timeandaccurately.
SnO2isoneofthemostcommonlyusedmaterialsforgassensingapplicationsduetoitsexcellentsensingproperties,suchashighsensitivity,fastresponse,andgoodselectivity.However,ithasarelativelyhighoperatingtemperature,poorstability,andlowselectivity.Toovercometheselimitations,researchershavedevelopedSnO2compositefilmsensorsbycombiningSnO2withothermaterials,suchasmetaloxides,carbonnanotubes,andpolymers,toenhancethesensingpropertiesofthesensors.
Inthispaper,wereviewtherecentdevelopmentsinSnO2compositefilmmethanegassensors,includingfabricationmethods,sensorstructures,andsensingperformances.Inaddition,wediscussthechallengesandfuturedirectionsintheresearchofSnO2compositefilmmethanegassensors.
2.FabricationMethods
ThefabricationofSnO2compositefilmmethanegassensorsinvolvestwosteps:preparationofSnO2materialsanddepo