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CO_2激光预处理对熔石英表面影响的实验研究 Abstract Inthisexperimentalstudy,weinvestigatedtheeffectofCO2laserpretreatmentonthesurfaceofmeltedquartz.Thestudywasaimedatdeterminingtheoptimallaserparametersforthepretreatmentprocess,aswellastheeffectofvariousparametersonthesurfacecharacteristics.TheresultsshowthatCO2laserpretreatmentcaneffectivelymodifythesurfaceofmeltedquartz,improvingitswettabilityandadhesion.Theoptimallaserpowerwasfoundtobe40Wwithalaserscanningspeedof400mm/s,andthepretreatmenttimewas5minutes. Introduction Meltedquartzhasbeenwidelyusedinthefieldofopticsduetoitsexcellentmechanical,thermal,andopticalproperties.However,itspoorsurfacewettabilityandadhesionoftenlimititsapplication.Severalsurfacemodificationmethods,suchasionimplantationandchemicalvapordeposition,havebeenproposedtoimprovethesurfaceproperties.Amongthem,lasersurfacemodificationhasbeenproventobeeffectiveandsimple. Inthisstudy,wefocusonCO2laserpretreatmentofthemeltedquartzsurface.TheCO2laser'suniquecharacteristics,suchasitshighpowerdensity,shortinteractiontimewiththesurface,andselectiveenergyabsorption,makeitanexcellenttoolforsurfacepretreatment.TheaimofthisstudyistoinvestigatetheeffectofCO2laserpretreatmentonmeltedquartz'ssurfacewettabilityandadhesionanddeterminetheoptimallaserparametersforpretreatment. ExperimentalProcedures Meltedquartz(99.99%)wasusedasthesubstrateinthisstudy.TheCO2laserwasusedtopretreatthesurfaceofmeltedquartz,andthesurfacepropertieswereanalyzedbyvariousmethods. TheexperimentalparametersforCO2laserpretreatmentincludedthelaserpower(20W,30W,40W,and50W),thescanningspeed(200mm/s,300mm/s,400mm/s,and500mm/s),andthepretreatmenttime(2min,5min,and10min). Thesurfacewettabilitywasevaluatedbymeasuringthecontactangleusingacontactanglegoniometer(KyowaInterfaceScience,CA-H).Thesurfacetopographywasobservedusingascanningelectronmicroscope(SEM,FEIQuanta250).ThesurfacechemicalcompositionwasanalyzedviaanX-rayphotoelectronspectroscopy(XPS,ThermoK-Alpha)instrument. ResultsandDiscussion Thelaserpoweraffectsthesurfacet