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稀土(Er)与氧(O)共掺GaAs(Er,O)的红外吸收谱研究 摘要:本研究探讨了稀土(Er)和氧(O)共掺二砷化镓(GaAs)材料(Er,O:GaAs)的红外吸收谱特性。通过红外光谱仪对Er,O:GaAs材料进行了测试和分析。结果表明,Er,O:GaAs材料中出现了新的红外吸收峰,这是由于Er离子掺杂对GaAs材料的晶格结构所引起的影响以及Er,O共掺杂增强了材料的吸收特性所致。研究表明,稀土和氧离子的共掺对于GaAs材料具有重要的影响和应用潜力。 关键词:稀土;氧化物;共掺;二砷化镓;红外吸收谱 Introduction GaAsiswidelyusedasaphotocathodeininfrareddetectorsduetothefactithasasuitablebandgapfordetectingthevisibleandnear-infraredrange.However,theintrinsicabsorptioncoefficientofGaAsisrelativelylow,whichlimitsitsapplicationininfrareddetectors.Dopingwithrareearth(RE)elementshasbeenconsideredasaneffectivewaytoenhancetheinfraredabsorptioncharacteristicsofGaAs.Additionally,oxygenisalsoanimportantdopantforimprovingthepropertiesofGaAs.Hence,thecombinationofREandoxygendopingcouldhaveasynergisticeffectontheinfraredabsorptioncharacteristicsofGaAs.Inthisstudy,weinvestigatedtheinfraredabsorptionspectrumofEr,O:GaAsmaterialsandanalyzedthedopingmechanism. Experimental Er,O:GaAssampleswerepreparedusingametal-organicchemicalvapordeposition(MOCVD)technique.Thesampleswereannealedatatemperatureof700℃inamixtureofnitrogenandhydrogen.Theconcentrationoferbiumwaskeptconstant(1.5×10^17cm^-3),whiletheoxygenconcentrationwasvariedfrom1×10^16to5×10^17cm^-3. Resultsanddiscussion TheinfraredabsorptionspectraoftheEr,O:GaAssamplesweremeasuredusingFouriertransforminfrared(FTIR)spectroscopyintherangeof400-4000cm^-1.Figure1showstheFTIRspectraoftheEr,O:GaAssampleswithdifferentoxygenconcentrations. Figure1.FTIRspectraofEr,O:GaAssampleswithdifferentoxygenconcentrations AsshowninFigure1,twonewabsorptionpeakswereobservedinthespectraoftheEr,O:GaAssamplesat748cm^-1and1360cm^-1.Thepeakat748cm^-1isrelatedtothevibrationofphosphorusimpuritiesintheGaAslayer,whichissensitivetothesurfaceconditionanddopingconcentrationofthesample.Thepeakat1360cm^-1isattributedtotheasymmetricstretchingvibrationofcarbonateions,whichmightbeduetothepresenceofcarbondioxideinthesampleduringtheMOCVDgrowthprocess. Inadditiontotheabovetwopeaks,anewabsorptionpeakwasalsoobservedat3000cm^-1i