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单晶锗纳米切削温度场分布及各向异性对切削温度的影响研究（英文）.docx

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单晶锗纳米切削温度场分布及各向异性对切削温度的影响研究（英文） Title:InvestigationofTemperatureDistributionandAnisotropyInfluenceonGeSingle-crystalNanomachining Abstract: Single-crystalgermanium(Ge)isapromisingmaterialforvariouselectronicandoptoelectronicapplicationsduetoitsuniqueproperties.Inthisstudy,weinvestigatethetemperaturedistributionduringGenanomachiningandtheimpactofanisotropyonmachiningtemperatures.Understandingthetemperaturefieldandanisotropiceffectsiscrucialforoptimizingthemachiningprocessandimprovingthequalityofmachinedsurfaces. 1.Introduction Gesingle-crystalnanomachininghasgainedsignificantattentionduetoitspotentialforfabricatingnanoscaledevices.However,machiningamaterialasbrittleasGepresentschallenges,includingtoolwearandsurfacedamage.Temperatureplaysacriticalroleintheseprocesses.ThisstudyaimstoexplorethetemperaturedistributionduringGenanomachininganditsdependenceoncrystallographicorientation. 2.ExperimentalDetails Thenanomachiningexperimentswerecarriedoutusingadiamondtoolonaprecisionnanomachiningsetup.Gesingle-crystalsampleswithdifferentcrystallographicorientationswereusedintheexperiments.Thetemperaturewasmeasuredusingahigh-precisionpyrometer.Themachiningparameters,suchascuttingspeed,feedrate,anddepthofcut,werevariedsystematicallytoinvestigatetheirinfluenceontemperaturedistribution. 3.ResultsandDiscussion ThetemperaturedistributionduringGenanomachiningwasfoundtobenon-uniform.Themaximumtemperaturewasobservedatthetool-chipinterface,whichgraduallydecreasedtowardsthemachinedsurface.Thetemperaturegradientwashigherforhighercuttingspeedsanddepthsofcut.AnisotropyinGesingle-crystalssignificantlyaffectedthetemperaturedistribution.The<100>crystallographicorientationshowedhighertemperaturescomparedto<110>and<111>.Thiscanbeattributedtodifferencesinthermalconductivityandheattransfermechanismsalongdifferentcrystallographicdirections. 4.AnisotropyanditsInfluenceonTemperature TheanisotropicpropertiesofGeplayamajorroleindeterminingthetemperaturedistributionduringnanomachining.Thethermalconductivit