预览加载中，请您耐心等待几秒...

一种新型光谱共焦位移测量系统研究.docx

预览
1/2
2/2

在线预览结束，喜欢就下载吧，查找使用更方便

下载提示 文本预览

如果您无法下载资料，请参考说明：

1、部分资料下载需要金币，请确保您的账户上有足够的金币

2、已购买过的文档，再次下载不重复扣费

3、资料包下载后请先用软件解压，在使用对应软件打开

一种新型光谱共焦位移测量系统研究 Title:AStudyonaNovelSpectralCoherenceDisplacementMeasurementSystem Abstract: OpticalMetrologyplaysasignificantroleinvariousfields,includingprecisionengineering,materialscience,andnanotechnology.Thedemandforaccuratedisplacementmeasurementsystemsisever-increasingduetotheneedforhigh-precisionmeasurementsinthesefields.Inthisstudy,anovelSpectralCoherenceDisplacementMeasurementSystem(SCDMS)isproposed.TheSCDMSutilizesthecoherencepropertiesoflighttomeasuredisplacementsaccurately.Thispaperdescribesthetheoreticalbackground,designconsiderations,experimentalsetup,andpotentialapplicationsoftheSCDMS. 1.Introduction: Displacementmeasurementisafundamentalaspectofprecisionengineering,wheremicrometer-levelaccuracyisrequired.Existingdisplacementmeasurementsystems,suchasinterferometers,havelimitationsconcerningmeasurementrange,resolution,andcomplexity.TheSCDMSaimstoaddresstheselimitationsbyutilizingthecoherencepropertiesoflighttoachieveaccurateandversatiledisplacementmeasurements. 2.TheoreticalBackground: TheSCDMSisbasedontheprincipleofSpectralCoherenceInterferometry(SCI).TheSCItechniqueemploysabroadbandlightsourceandaspectralinterferometertoextractinformationaboutdisplacements.Thecoherencefunctionoflightisusedtomeasurethephasesofthespectralinterferencesignals,allowingaccuratedisplacementmeasurements. 3.DesignConsiderations: ThedesignoftheSCDMSinvolvesvariousconsiderations,suchastheselectionoflightsource,spectralinterferometerdesign,andsignalprocessingtechniques.Theseconsiderationsarediscussedindetail,emphasizingtheimportanceofoptimizingsystemparametersforachievinghighaccuracyandresolution. 4.ExperimentalSetup: TheexperimentalsetupoftheSCDMSispresented,includingtheconfigurationofthespectralinterferometer,lightsourceselection,andsignaldetectionscheme.ExperimentalresultsdemonstratingtheaccuracyandstabilityoftheSCDMSarealsoprovided. 5.SystemPerformanceEvaluation: TheperformanceoftheSCDMSisevaluatedintermsofmeasurementrange,resolution,repeatability,andlinearity.Comparative