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高速和高功率硅基光电探测器的研究 Title:ResearchonHigh-SpeedandHigh-PowerSilicon-basedPhotodetectors Abstract: Silicon-basedphotodetectorshavebecomecriticalcomponentsinvariousapplicationssuchastelecommunications,sensing,andimagingduetotheircompatibilitywithexistingsilicon-basedtechnology.Inrecentyears,researcheffortshavefocusedondevelopinghigh-speedandhigh-powersilicon-basedphotodetectorstomeettheincreasingdemandforhigh-performancephotonicdevices.Thispaperaimstoreviewtherecentadvancementsandchallengesinthefieldofhigh-speedandhigh-powersilicon-basedphotodetectors. 1.Introduction Thedemandforhigh-speedandhigh-powerphotodetectorshasbeendrivenbytherapidexpansionofdatacommunicationnetworksandtheincreasingneedforhigh-performanceimagingsystems.Silicon-basedphotodetectorsofferadvantagessuchascost-efficiency,integrationwithcomplementarymetal-oxide-semiconductor(CMOS)technology,andcompatibilitywithfiber-opticsystems.However,traditionalsilicon-basedphotodetectorssufferfromlimitationssuchaslowresponsivityandlimitedbandwidth.Therefore,extensiveeffortshavebeenmadetoovercometheselimitationsandexploreinnovativeapproachestodevelophigh-speedandhigh-powersilicon-basedphotodetectors. 2.High-SpeedSilicon-basedPhotodetectors Varioustechniqueshavebeenemployedtoenhancethespeedofsilicon-basedphotodetectors.Oneapproachistoreducethesizeofthephotodetectortodecreasethetransittimeofthechargecarriers.Anotherapproachinvolvesusingnovelmaterialswithhighcarriermobility,suchasgermanium,incombinationwithsilicontoimprovethespeedofchargeseparation.Furthermore,advanceddevicestructuressuchasPINdiodes,avalanchephotodiodes(APDs),andmetal-semiconductor-metal(MSM)photodetectorshavebeeninvestigatedtoenhancethespeedofsilicon-basedphotodetectors.Thesetechniqueshaveshownsignificantimprovementsinbandwidthandresponsetime,enablinghigh-speedoperationofsilicon-basedphotodetectors. 3.High-PowerSilicon-basedPhotodetectors Toachievehigh-poweroperation,silicon-basedphotodetectorsneedtobedesignedwithhighresponsivityandefficientoptical-to-el