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多层结构紫外透明导电薄膜的制备及性能研究.docx

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多层结构紫外透明导电薄膜的制备及性能研究 Abstract Multi-layeredUV-transparentconductivefilms(MTCFs)composedofindiumtinoxide(ITO)andsilver(Ag)werepreparedbyRFmagnetronsputteringonpolyethyleneterephthalate(PET)substrates.TheMTCFswerecharacterizedforopticaltransmittance,electricalconductivity,surfacemorphology,andadhesionstrength.TheresultsshowedthattheMTCFsexhibitedhightransmittanceintheUVregion,lowresistance,andgoodadhesion.TheMTCFswithalternatinglayersofITOandAgexhibitedbetterelectricalconductivitycomparedtothesingle-layerITOfilm.ThepreparedMTCFshavepotentialapplicationsinUVoptoelectronicsandtouchscreens. Introduction UV-transparentconductivefilms(TCFs)areessentialcomponentsinvariousapplicationssuchastouchscreens,liquidcrystaldisplays(LCDs),organiclight-emittingdiodes(OLEDs),andphotovoltaiccells.Indiumtinoxide(ITO)hasbeenwidelyusedasaTCFduetoitsoutstandingelectricalconductivityandopticaltransparencyinthevisiblespectrum.However,thehighcostandscarcityofindium,aswellasitspoorperformanceintheUVregion,havelimiteditsapplication.Therefore,alternativeTCFswithbetterUVtransparencyandlowercosthavebeenextensivelyinvestigated. Silver(Ag)isanattractivematerialasaTCFduetoitshighelectricalconductivityandlowcost.However,AgfilmsarenotsuitableforUVapplicationsastheyexhibithighabsorptionandreflectivityintheUVregion.Recently,multi-layeredfilmscomposedofITOandAghavebeenproposedaspotentialalternativesforUV-transparentconductivefilms.AlternatinglayersofITOandAgcanprovidehightransmittance,lowresistance,andgoodadhesion. Inthisstudy,multi-layeredUV-transparentconductivefilms(MTCFs)composedofITOandAgwerepreparedbyRFmagnetronsputteringonPETsubstrates.TheMTCFswerecharacterizedfortheiropticaltransmittance,electricalconductivity,surfacemorphology,andadhesionstrength. Experimental TheMTCFswerepreparedonPETsubstratesbyRFmagnetronsputtering.Thedepositionwascarriedoutinavacuumchamberwithapressureof5x10-3Pa.ThetargetsusedwereITOandAgwithathicknessof50nmeach.TheMTCFsweredepositedatroomtemperaturewithadepositionrateof1nm/s.