基于X射线相衬成像技术的光栅品质无损检测（英文）.docx

基于X射线相衬成像技术的光栅品质无损检测（英文）
基于X射线相衬成像技术的光栅品质无损检测
摘要：
光栅作为一种常用的光学元件，通常被用于光学干涉仪和激光干涉仪等精密测量仪器中。由于光栅在制备过程中存在各种制造缺陷和表面缺陷，这些缺陷可能会导致光学信号的噪声和信号强度的降低，因此对光栅的品质进行无损检测具有重要意义。本文介绍了基于X射线相衬成像技术的光栅品质无损检测方法，这种方法可以对光栅表面和内部的缺陷进行高分辨率成像。实验结果表明，该方法可以提高光栅品质检测的准确性和可靠性。
关键词：X射线相衬成像，光栅，无损检测，品质控制
Introduction:
Gratingisacommonopticalcomponent,whichisusuallyusedinprecisionmeasurementinstrumentssuchasopticalinterferometersandlaserinterferometers.Duringthefabricationprocess,gratingsmayhavevariousmanufacturingdefectsandsurfacedefects,whichmaycausenoiseintheopticalsignalandreducethesignalintensity.Therefore,non-destructivetestingofgratingqualityisofgreatsignificance.Inthispaper,weintroduceanon-destructivetestingmethodforgratingqualitybasedonX-rayphase-contrastimagingtechnology,whichcanimagethesurfaceandinternaldefectsofthegratingwithhighresolution.Experimentalresultsshowthatthismethodcanimprovetheaccuracyandreliabilityofgratingqualitytesting.
X-rayphase-contrastimaging:
X-rayphase-contrastimagingisanon-destructiveimagingtechnologythatutilizesthephaseshiftofX-rayspassingthroughamaterialtoobtainimagecontrast,whichisdifferentfromconventionalX-rayimagingthatusestheabsorptionofX-raystoobtainimagecontrast.ThephaseshiftofX-rayspassingthroughamaterialismainlycausedbytherefractiveindexdifferencebetweenthematerialandthesurroundingmedium.ThephaseshiftcanbemeasuredbyusinganX-rayinterferometer,whichconsistsofasource,abeamsplitter,andadetector.
X-rayphase-contrastimaginghasseveraladvantagesoverconventionalX-rayimaging.First,itcanimagelow-contrastmaterialsthataretransparenttoX-rays,suchasbiologicaltissues,polymers,andcomposites.Second,itcanimagesmallstructureswithhighresolution,suchasmicroelectronics,microfluidics,andmicrofabricateddevices.Third,itcanreducetheX-raydosetothesample,sincethephaseshiftismuchstrongerthantheabsorptioneffectathighX-rayenergies.
X-rayphase-contrastimagingforgratingqualitytesting:
Gratingqualitytestingisusuallyperformedbyusingopticalprofilometers,interferencemicroscopes,orscanningelectronmi