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CAC三电极结构MEMS电化学地震检波器研究.docx

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CAC三电极结构MEMS电化学地震检波器研究 Title:ResearchonCACThree-ElectrodeMEMSElectrochemicalSeismicDetectors Abstract: Seismicdetectionplaysacrucialroleinunderstandingandmonitoringearthquakes,providingvaluabledataforseismichazardassessmentandmitigation.Inrecentyears,MEMS(MicroElectroMechanicalSystems)technologyhasemergedasapromisingavenueforseismicdetectionduetoitsminiaturization,lowpowerconsumption,highsensitivity,andintegrationcapabilities.ThispaperfocusesontheCAC(Capacity,Amplification,andConversion)three-electrodeMEMSelectrochemicalseismicdetectorandpresentsacomprehensivereviewofitsresearchanddevelopment. Introduction: Seismicdetectorsplayapivotalroleingeophysicalresearch,providingaccuratemeasurementsofgroundvibrationsresultingfromearthquakes.Traditionalseismicdetectorsreliedonmechanicalsensingelements,limitingtheirsensitivityandaccuracy.MEMStechnologyovercomestheselimitationsbyintegratingvariouscomponentsonasinglechip,enablingthedevelopmentofcompact,high-sensitivityseismicdetectors. 1.MEMSTechnologyandSeismicDetection: 1.1IntroductiontoMEMSTechnology: ThissectionprovidesanoverviewofMEMStechnology,includingitsfabricationprocesses,advantages,andapplications.ItemphasizesthepotentialofMEMStechnologyinseismicdetection. 1.2SeismicDetectionTechniques: ThissubsectionexploresdifferentseismicdetectiontechniquesemployedinMEMS-baseddetectors.Itcomparestheiradvantagesanddisadvantages,highlightingtheelectrochemicalapproachemployedbytheCACthree-electrodeMEMSdetector. 2.CACThree-ElectrodeMEMSElectrochemicalSeismicDetector: 2.1WorkingPrinciple: ThissectionexplainstheworkingprincipleoftheCACthree-electrodeMEMSdetector,highlightingitscapacity,amplification,andconversionstages.Itelucidateshowseismicvibrationsareconvertedintomeasurableelectricalsignals. 2.2DesignandFabrication: Thissubsectionprovidesanin-depthdescriptionoftheCACthree-electrodeMEMSdetector'sdesignandfabricationprocesses.Itdiscussestheelectrochemicalsensors,amplificationcircuitry,andothercomponentsinvolvedinitsconstruction. 2.3Perfo