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飞秒激光加工铌酸锂晶体:原理与应用(英文) Title:PrincipleandApplicationsofFemtosecondLaserMachiningofLithiumNiobateCrystals Abstract: Femtosecondlasermachiningisaversatiletechniquethathasgainedsignificantattentioninthefieldofmaterialprocessing.Thispaperexplorestheprincipleandapplicationsoffemtosecondlasermachiningspecificallyinthecontextoflithiumniobatecrystals.Lithiumniobate(LiNbO3)isawidelyusedferroelectricmaterialduetoitsexcellentelectro-opticandnonlinearopticalproperties.TheabilitytopreciselycontrolthefabricationofLiNbO3crystalsusingfemtosecondlasersopensupnewpossibilitiesinvariousapplicationssuchasintegratedphotonics,opticalwaveguides,microfluidics,andnonlinearoptics.Thispaperdiscussestheunderlyingprinciplesoffemtosecondlasermachining,theadvantagesandchallengesassociatedwiththeprocess,andprovidesanoverviewofthediverseapplicationsoffemtosecondlasermachiningonlithiumniobatecrystals. 1.Introduction -Briefbackgroundonlithiumniobatecrystalsandtheirproperties -Introductiontofemtosecondlasermachiningasapromisingtechnique 2.PrincipleofFemtosecondLaserMachining -Explanationofthefemtosecondlaseranditsuniqueproperties -Interactionmechanismsoffemtosecondlaserpulseswithmaterials -Heattransferandmaterialremovalprocessesinfemtosecondlasermachining 3.AdvantagesofFemtosecondLaserMachiningonLithiumNiobateCrystals -Highprecisionandsub-micronmachiningcapabilities -Minimalthermaldamagetosurroundingmaterial -Reducedcrackformationandimprovedsurfacequality 4.ChallengesinFemtosecondLaserMachiningonLithiumNiobateCrystals -Thermaleffectsandheataccumulation -Materialre-depositionandrecastlayerformation -Surfaceroughnessanddebrisgeneration 5.ApplicationsofFemtosecondLaserMachiningonLithiumNiobateCrystals -Integratedphotonicsandoptoelectronicdevices -Waveguidefabricationandphotoniccircuits -Microfluidicdevicesforlab-on-a-chipapplications -Nonlinearopticsandfrequencyconversionprocesses 6.Conclusion -Summaryoftheprincipleandapplicationsoffemtosecondlasermachiningonlithiumniobatecrystals -Futureprospectsandpotent