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大量程电涡流位移传感器设计与实验研究.docx

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大量程电涡流位移传感器设计与实验研究 Title:DesignandExperimentalStudyofaLargeRangeEddyCurrentDisplacementSensor Abstract: Eddycurrentdisplacementsensorsarewidelyusedinvariousindustrialandscientificapplications.Thispaperaimstopresentthedesignandexperimentalstudyofalargerangeeddycurrentdisplacementsensor.Thesensorisdesignedtomeasurelineardisplacementswithahighdegreeofaccuracyandlinearity.Theexperimentalstudyincludesthecalibrationofthesensor,measurementaccuracyandrepeatability,andcomparisonwithotherdisplacementmeasurementtechniques.Theresultsdemonstratetheeffectivenessandreliabilityoftheproposedsensorindifferentdisplacementmeasurementscenarios. 1.Introduction Eddycurrentdisplacementsensorshavegainedsignificantpopularityinrecentyearsduetotheirnon-contactnatureandhighaccuracy.Theyareparticularlyusefulinapplicationsinvolvingharshenvironmentsormovingpartswheretraditionalmechanicalsensorsmaynotbesuitable.Thispaperfocusesonthedesignandexperimentalstudyofalargerangeeddycurrentdisplacementsensor. 2.SensorDesign Thedesignofthesensorinvolvesseveralkeycomponentssuchasthecoilarrangement,excitationsource,signalconditioningcircuit,anddataacquisitionsystem.Thecoilarrangementiscrucialforachievinghighsensitivityandlinearity.Variouscoilconfigurations,suchasdifferentialandpancakecoils,canbeemployedbasedonthespecificmeasurementrequirements. 3.Calibration Calibrationisanessentialstepinensuringtheaccuracyandreliabilityofthesensor.Thisinvolvesdeterminingtherelationshipbetweenthemeasuredoutputandtheactualdisplacement.Severalcalibrationmethodscanbeused,includingtheuseofreferencestandards,laserinterferometry,ormechanicalgauges.Thecalibrationprocedureandtheassociateduncertaintiesarecarefullydocumentedtoprovidetraceabilityandconfidenceinthemeasurements. 4.MeasurementAccuracyandRepeatability Theaccuracyandrepeatabilityofthesensorareevaluatedthroughaseriesofexperiments.Theseexperimentsinvolvemeasuringstandarddisplacementtargetsatdifferentpositionsandspeeds.Statisticalmethodssuchasthestandarddeviationanderroranalysis