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基于旁路结构的磁弹效应索力传感器研究 Abstract Thispaperpresentsastudyonmagneticforceeffectforcesensorbasedonbypassstructure.Thebypassstructureisutilizedtoimprovetheperformanceofthesensor,enhancingthesensitivityandreducingthehysteresis.Theworkprincipleofmagneticforceeffectforcesensorisintroduced,andthedesignofthebypassstructureisdiscussedindetail.Thesimulationresultsindicatethatthebypassstructurecaneffectivelydecreasetheresidualmagneticforcesandimprovethestabilityofsensingoutput.Aprototypeofthesensorisimplementedandexperimentalresultsshowthattheproposedsensorcanprovidehighaccuracyandexcellentrepeatability,whichisofgreatpotentialinvariousforcemeasurementapplications. Keywords:magneticforceeffect,forcesensor,bypassstructure,sensitivity,hysteresis 1.Introduction Inrecentyears,magneticforceeffecttechnologyhasbeenwidelyappliedinthedevelopmentofforcesensors,whichcanprovidemoreprecisesensingcapabilitycomparedwithtraditionalmechanicalsensors[1,2].Magneticforceeffectsensorsutilizemagneticfieldvariationscausedbyexternalforcetodetectandmeasuretheforceappliedonthesensor,andtheyhavetheadvantagesofhighresolution,highaccuracy,andgoodlinearity.Therefore,theyarewidelyusedinvariousforcemeasurementapplications,suchasrobotics,aerospace,andbiomedicalengineering[3-5]. However,magneticforceeffectsensorsstillhavesomechallengesastheirperformanceisaffectedbyvariousfactors,suchashysteresis,drift,andresidualmagneticforces[6-8].Toimprovetheperformanceofthesensors,manyeffortshavebeenmade,suchasusingcompensationmethodstoreduceerrorscausedbytemperatureandnonlinearities,andoptimizingthesensorstructuretoenhancethesensitivityandstability[9-11]. Inthispaper,weproposeamagneticforceeffectforcesensorbasedonbypassstructure.Thebypassstructureisintroducedtoreducetheresidualmagneticforcescausedbyadjacentmagneticelements,andimprovethestabilityofsensingoutput.Thedesignofthesensorisdiscussedindetail,andsimulationandexperimentalresultsarepresentedtoverifytheperformanceofthesensor. 2.MagneticForceEffectForceSensor 2.1WorkingPrincip