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MEMS陀螺信号读出电路设计.docx

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MEMS陀螺信号读出电路设计 Introduction MEMS(Micro-Electro-MechanicalSystems)gyroscopesareusedinmanyapplicationssuchasnavigation,roboticsanddrones,andtheyrequireaccurateandreliablesignalconditioningcircuitsforefficientoperation.TheMEMSgyroscopesignalconditioningcircuitallowstheextractionofangularvelocitymeasurementsfromthedevice'soutput.ThispaperdiscussesthedesignofanMEMSgyroscopesignalconditioningcircuit,withafocusontheReadoutcircuit. MEMSGyroscopeOverview AMEMSgyroscopeisasmall,low-powerdevicethatcandetecttheangularrateofthedeviceitismountedon.Thisangularrateismeasuredasthechangeinangularvelocitywithrespecttotime.ThebasicprincipleofoperationofaMEMSgyroscopeisbasedontheCorioliseffect.TheCorioliseffectisthedeflectionofamovingobjectthatoccurswhentheobjectisviewedfromarotatingframeofreference. TheMEMSgyroscopeconsistsofasensingelement,whichisusuallyamovingmass(proofmass)suspendedbyflexiblehinges.Theproofmassisdriventooscillateinaplaneperpendiculartotheinputaxis.TheCorioliseffectcausesadisplacementoftheproofmassalongadirectionperpendiculartotheoscillationaxis,whichisproportionaltotheangularrate.Thisdisplacementisdetectedbyasensingelement,whichconvertsitintoanelectricalsignalproportionaltotheangularrate. MEMSGyroscopeSignalConditioningCircuit TheMEMSgyroscopesignalconditioningcircuitisdesignedtoprocesstheelectricalsignalfromthesensingelementandextracttheangularratemeasurement.Thesignalconditioningcircuitcomprisesseveralfunctionalblocks,includingtheReadoutcircuit,whichisthefocusofthispaper.TheReadoutcircuitisresponsiblefordetecting,amplifyingandfilteringtheoutputsignalfromthesensingelement,andconvertingitintoavoltageproportionaltotheangularrate. TheReadoutcircuitcanbeimplementedusingdifferenttopologiesdependingontherequirementsoftheapplication.ThemostcommontopologiesaretheChargeDetectionAmplifier(CDA)andtheVoltageDetectionAmplifier(VDA). ChargeDetectionAmplifier(CDA) TheCDAReadoutcircuitconsistsofacurrent-to-voltageconverter(transimpedanceamplifier)followedbyanintegrator(low-passfil