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基于MEMS微振镜技术的激光像源驱动电路的研究与实现的中期报告 Abstract: Inthisreport,wepresentourprogressintheresearchandimplementationofalaserimagesourcedrivingcircuitbasedonMEMSmicro-mirrortechnology.OurworkincludesthedesignandfabricationofaMEMSmicro-mirror,aswellasthedevelopmentandtestingofadrivingcircuitforthemicro-mirror.Theresultsshowthatthedrivingcircuitcangeneratethedesiredelectricalsignalstocontrolthedeflectionangleofthemicro-mirror.Furtheroptimizationofthecircuitisstillneededtoimproveitsperformance. Introduction: MEMSmicro-mirrortechnologyhasbeenwidelyusedinvariousfields,suchasopticalcommunication,biomedicalimaging,andprojectiondisplaysduetoitssmallsize,lowpowerconsumption,andhighmirrorspeed.Inthisproject,weaimtodesignandimplementadrivingcircuitforaMEMSmicro-mirrortocreatealaserimagesource.OurworkinvolvesthedesignandfabricationoftheMEMSmicro-mirror,aswellasthedevelopmentandtestingofadrivingcircuit. DesignandFabricationoftheMEMSMicro-Mirror: TheMEMSmicro-mirrorwasdesignedusingastandardMEMSprocess.Themirrorwasfabricatedonasilicon-on-insulator(SOI)waferusingdeepreactiveionetching(DRIE)andmetaldeposition.Themirrorsizewas500μm×500μmandthethicknesswas2μm.Thedesigngoalwastoachieveamaximumdeflectionangleof10°withalowdrivingvoltage. DevelopmentandTestingoftheDrivingCircuit: Thedrivingcircuitwasdesignedusingalow-voltagedifferentialsignaling(LVDS)andahigh-voltagedriver.TheLVDSwasusedtogeneratethedifferentialsignalsforthehorizontalandverticalcontrolofthemirror.Thehigh-voltagedriverwasusedtogeneratethevoltagerequiredfortheelectrostaticactuationofthemirror.ThecircuitwassimulatedusingSPICEandoptimizedforthedesiredperformance.Thedrivingcircuitwasthenimplementedonaprintedcircuitboard(PCB)andtestedwiththeMEMSmicro-mirror. Results: ThedrivingcircuitwasabletogeneratethedesiredelectricalsignalstocontrolthedeflectionangleoftheMEMSmicro-mirror.Themaximumdeflectionangleachievedwas7.5°withadrivingvoltageof35V.Theresonancefrequencyofthemirrorwasmeasuredtobe6.5kHz.However,furtheroptimizationofthecircuitisstillne