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无机溶胶—凝胶法制备VO2薄膜及其性能研究的中期报告 Abstract Inthisreport,wepresentamid-termprogressofourstudyonthepreparationandperformanceofVO2filmsusingtheinorganicsol-gelmethod.Specifically,wefocusontheoptimizationofthepreparationprocessandthecharacterizationofthestructural,opticalandelectricalpropertiesofthepreparedVO2films. Introduction Vanadiumdioxide(VO2)isasemiconductingmaterialthatundergoesasharpandreversiblephasetransitionfromalow-temperatureinsulatingphasetoahigh-temperaturemetallicphaseataround68°C.Thistransitionisassociatedwithasignificantchangeinthematerialproperties,includingtheelectricalconductivity,opticaltransmittance,andthermalconductivity.Duetotheseuniqueproperties,VO2hasbeenwidelystudiedforpotentialapplicationsinsmartwindows,thermalsensors,andelectricdevices. Theinorganicsol-gelmethodhasbeendemonstratedasaneffectivewaytoprepareVO2filmswithgoodqualityandcontrollableproperties.Comparedtoothermethodssuchassputteringandthermaloxidation,thesol-gelmethodoffersseveraladvantages,includinglow-cost,simplicity,andversatilityinsynthesis. Objectives Inthisstudy,ourobjectivesare: 1.TooptimizethepreparationprocessofVO2filmsusingtheinorganicsol-gelmethod 2.Tocharacterizethestructural,optical,andelectricalpropertiesofthepreparedVO2films 3.ToevaluatethepotentialapplicationsofthepreparedVO2filmsinsmartwindowsandthermalsensors ExperimentalMethod Theinorganicsol-gelmethodwasusedtoprepareVO2filmsonglasssubstrates.Theprecursorsolutionwaspreparedbydissolvingvanadium(V)isopropoxideandacetylacetoneinethanol,followedbyaddinghydrochloricacidtoactasthecatalyst.Thesolutionwasthenstirredfor1hourtoformthesol,whichwassubsequentlyagedfor24hourstoformthegel.Thegelwasthenspin-coatedontotheglasssubstrate,followedbyannealingatvarioustemperaturestoformtheVO2film. ThestructuralpropertiesoftheVO2filmswerecharacterizedusingX-raydiffraction(XRD)andscanningelectronmicroscopy(SEM).TheopticalpropertieswerecharacterizedusingUV-Vis-NIRspectroscopy,andtheelectricalpropertiesweremeasuredusingafour-pointprobe. Resultsa