预览加载中，请您耐心等待几秒...

铝超导隧道结的制备工艺与特性的研究的中期报告.docx

预览
1/2
2/2

在线预览结束，喜欢就下载吧，查找使用更方便

下载提示 文本预览

如果您无法下载资料，请参考说明：

1、部分资料下载需要金币，请确保您的账户上有足够的金币

2、已购买过的文档，再次下载不重复扣费

3、资料包下载后请先用软件解压，在使用对应软件打开

铝超导隧道结的制备工艺与特性的研究的中期报告 Abstract: Theresearchonthepreparationtechnologyandcharacteristicsofaluminumsuperconductingtunneljunctionswascarriedout.Inthismid-termreport,thepreparationprocessofthealuminumsuperconductingtunneljunctionswasdescribedindetail,includingthedepositionofaluminumfilms,theformationoftunneljunctionsbyoxidation,andthecleaningprocess.ThecharacterizationofthetunneljunctionswasperformedbymeasuringtheirIVcurvesandtunnelingspectra.Thepreliminaryresultsshowedthatthetunnelingcharacteristicsofthealuminumsuperconductingtunneljunctionswereconsistentwiththeexpectedcharacteristicsofasuperconductingtunneljunctionandthatthejunctionshadgoodreproducibility. Introduction: Superconductingtunneljunctionshavebeenwidelyusedinvariousfields,suchasquantumcomputing,superconductingelectronics,andhighenergyphysics.Amongvarioussuperconductingmaterials,aluminumisoneofthecommonlyusedmaterialsduetoitshighcriticaltemperatureandlowfabricationcost.Inthisstudy,weaimtoprepareandcharacterizealuminumsuperconductingtunneljunctions. ExperimentalMethods: Thesubstrateusedinthisstudywasasiliconwaferwithanativeoxidelayer.Aluminumfilmsweredepositedonthesubstrateusingathermalevaporationmethod.Thedepositionratewasabout0.5Å/s,andthefilmthicknesswasabout50nm.Afterthedeposition,thefilmswereannealedat330℃for5minutesinavacuumtoimprovethecrystallinityofthefilms. Thetunneljunctionswereformedbytheoxidationofthealuminumfilms.Thefilmswereoxidizedinapureoxygenenvironmentatroomtemperaturefor1hour.Theoxidationconditionwasadjustedbychangingtheoxygenpressure.Thethicknessoftheoxidelayerwascontrolledbyadjustingtheoxidationtime. Aftertheoxidation,thetunneljunctionswerecleanedbysonicatinginacetoneandisopropylalcoholfor5minutes,respectively. ResultsandDiscussion: TheIVcurvesofthealuminumsuperconductingtunneljunctionsweremeasuredatatemperatureof4.2KusingaKeithley2400sourcemeter.Theresultsshowedthatthetunnelingcharacteristicsofthejunctionswereconsistentwiththeexpectedcharacteristicsofasuperconductingtunneljunction,which