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SEM扫描电镜.ppt

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电子显微分析2024/9/20分辨率（Resolution）2024/9/20TheoreticalresolutionofopticalmicroscopeForglasslens:~90º，sin~0.95.Whenthemediumisair,n=1,theresolutionisWhenacceleratingvoltageV<500Volts,thevelocityofelectronismuchsmallerthanthespeedoflight,mm0(massofstaticelectron,9.10910-31kg).soFormostTEM,Visabout100-200kV,thevelocityoftheelectronsbecomesgreaterthanhalfthespeedoflight!Relativisticeffectsshouldbetakenintoaccount.From电子显微镜的发展历程电子显微镜的发展历程鲁斯卡（ErnstRuska， 1906-1988）ComparisonofElectronmicroscopewithopticalmicroscope2024/9/20SecondaryElectrons(SE)BackscatteredElectrons(BSE)172024/9/201920212024/9/202024/9/20Shortmagneticlensisusedinelectronmicroscopethetrajectoryofelectronrotates电子显微镜的像差SphericalaberrationSphericalaberrationSphericalaberration2024/9/20Astigmatism（象散）AstigmatismDistortionChromaticaberration日光透过三棱镜后的色散现象ChromaticaberrationComparisonofaberrationsCscorrectorconsistofaseriesoftwohexapoleandtwotransferlensesdoubletslocatedbetweentheobjectiveandfirstintermediatelensesinthemicroscopecolumn.TheCscorrectornullstheCs.2024/9/202024/9/202024/9/202024/9/202024/9/20JEM-2010FmicroscopewithCscorrectorinstalled2024/9/20电子枪热源电子枪场发射枪Characteristicsofthethreesourcesoperatingat100kV50ImageFormationinSEM2024/9/202024/9/202024/9/202024/9/202024/9/202024/9/202024/9/20电制冷 SDD探头2024/9/202024/9/202024/9/202024/9/202024/9/202024/9/202024/9/202024/9/20FeaturesofEDS2024/9/20FeaturesofWDSWDShasmuchhighresolutioncomparedwithEDS.TheoverlappedpeakinEDSmaybeseparatedinWDS.ComparisonofEDSandWDS2024/9/2076777879802024/9/202024/9/202024/9/2084852024/9/20此课件下载可自行编辑修改，此课件供参考！ 部分内容来源于网络，如有侵权请与我联系删除！感谢你的观看！