热氧化背面钝化晶硅电池工艺的探究.pdf

热氧化背面钝化晶硅电池工艺的探究

鲁贵林1,2，周利荣2，沈文忠1
1上海交通大学太阳能研究所200240上海
2上海神舟新能源发展有限公司201120上海
Outlook

1.StructureofthePERC-typesolarcells

2.ProcessflowofthePERC-typesolarcells

3.Relevantdataanalysis

4.Conclusions

5.Acknowledgements
1.StructureofthePERC-typesolarcells

DifferencesbetweenConventionalsolarcells(left)and
PERC-typesolarcells(right)
2.ProcessflowofthePERC-typesolarcells

6’FZp-Siwafer,0.5-3Ω•cm,150-180μm

Texturing

Diffusion
NoALDequipment
EdgeisolationandPSGetch

FSFPECVDSiNxTherm-oxidationSiOx

ScreenprintingFSF/BSFPECVDSiNx

SinteringBSFLasergrooving

TestingandSortingScreenprintingEtchingpaste

Sintering

TestingandSorting
2-1.Differentthermaloxidationprocess

Groups
RPSA1RPSA2RPSA3RPSA4RPSA5
Parameters

Temperatures/℃700800800800700

Time/h42343
2-2.τandVocatvariousthermaloxidationprocess

2-2-1.Minoritycarrierlifetimeτ/μs
2-2-2.Open-circuitVoltageVoc/V
2-3.Thesurfacetopographyafterlaserablation

Laserparameters:dual-pulse,frequency-200kHz,power-3.7W,
velocity-4m/s,groovewidth-40μm,groovepitch-1mm
3.Relevantdataanalysis

3-1.Theopen-circuitvoltage(Voc)andtheshort-circuitcurrent(Isc)
3-2.Theseriesresistance(Rs)andtheshuntresistance(Rsh)
3-3.Thefillfactor(FF)andtheconversionefficiency(Eff)
3-4.Theperformanceparametersofthevarioussamples

Parameters

Voc/VIsc/AFF/%Eff/%Rs/mΩRsh/ΩEff-Max/%Eff-Min/%
Groups

RPSA10.6499.03278.3519.263.09118.3619.4319.02

RPSA20.6538.98878.0119.203.2192.0219.3618.89

RPSA30.6569.06177.9719.393.43192.2119.5019.26

RPSA40.6499.02378.2219.223.1892.8519.4019.03

RPSA50.6508.92978.3419.073.1378.5819.2418.68
3-5.EQEofthePERC-typesolarcell
4.Conclusions

Ⅰ.Comparedwiththeconventionalsolarcells,theVoc,Isc,EFFand
EQEwereimprovedgreatly,passivationeffectisremarkable.

Ⅱ.Matchedwiththethermaloxidationmethod,lasergrooving,
FSF/BSFPECVD,Screen-printing(SP)aluminumpasteand
sinteringshouldbechangedaccordingly.

Ⅲ.Inordertoachieveproductionrequirements,thismethodshouldbe
furtheroptimized.
5.Acknowledgements

Theauthorswouldli