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净液车间综合通风技术控制砷化氢效果研究.docx

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净液车间综合通风技术控制砷化氢效果研究 Title:StudyontheComprehensiveVentilationandTechnologyControlofArsenicHydrideinthePurificationWorkshop Abstract: Arsenichydride,alsoknownasarsine,isahighlytoxicandflammablegas.Itiscommonlyusedinthepurificationworkshopfortheproductionofsemiconductormaterialsandasadopingagent.However,exposuretoarsinegasposesserioushealthriskstoworkers.Toensureasafeworkingenvironment,thecomprehensiveventilationandtechnologycontrolofarsineinthepurificationworkshopiscrucial.Thisstudyaimstoinvestigatetheeffectivenessofvariousventilationtechniquesandtechnologycontrolsinreducingarsineconcentrations. 1.Introduction: Thepurificationworkshopisacriticalareainsemiconductormanufacturing,wherehighlytoxicgasessuchasarsineareusedinvariousprocesses.Properventilationplaysacriticalroleinmaintainingasafeworkingenvironmentandreducingexposuretoharmfulgases.Thispaperaimstoexplorethedifferentmethodsofventilationandtechnologycontroltoeffectivelymitigatetherisksassociatedwitharsineexposureinthepurificationworkshop. 2.LiteratureReview: Previousstudieshaveidentifiedseveraltechniquesforcontrollingarsineconcentrationinthepurificationworkshop.Thesetechniquesincludelocalexhaustventilation,dilutionventilation,andaircurtainsystems.Moreover,technologycontrolmethodssuchasautomaticmonitoringsystemsandemergencyresponsesystemsarealsoemployedtoensurethesafetyofworkers. 3.Methodology: Toevaluatetheeffectivenessofventilationtechniquesandtechnologycontrolmethodsinreducingarsineconcentration,acomprehensivestudywasconductedinareal-worldpurificationworkshop.Arsineconcentrationmeasurementsweretakenatvariouslocationswithintheworkshop,includinghigh-riskareassuchasthegassupplyandexhaustsystems.Differentventilationtechniquesandtechnologycontrolmethodswereimplemented,andtheresultingchangesinarsineconcentrationweremeasuredandcompared. 4.Results: Thestudyfoundthatlocalexhaustventilationsystems,combinedwithdilutionventilation,effectivelyreducedarsineconcentrationinthepurificationworkshop.Bydirectingarsinegasemissionsto